@misc{misc248334c2,
title   = {Chemical bonding and composition of silicon nitride films prepared by inductively coupled plasma chemical vapor deposition},
author = {Matsuoka, Masao and Isotani, Sadao and Mamani, Wilmer Alexe Sucasaire and Zambom, Luís da Silva and Ogata, Katsuhiko},
year = {2010},
publisher = {Elsevier Science},
booktitle   = {International Workshop on Plasma-Based Ion Implantation and Deposition}
}