@article{articlec288a81f,
title   = {A study of metal contact properties on thermal annealed PECVD SiC thin films for MEMS applications},
author = {Oliveira, Alessandro Ricardo and Pereyra, Inés and Páez Carreño, Marcelo Nelson},
year = {2010},
doi = {10.1002/pssc.200982839},
journal   = {Physica Status Solidi C}
}