@article{article1a4be487,
title   = {Study of TiOxNy MOS capacitors},
author = {Albertin, Katia Franklin and Souza, Denise Criado Pereira de and Zuñiga Paez, Alejandro A. and Pereyra, Inés},
year = {2010},
doi = {10.1149/1.3183707},
journal   = {Microelectronics Technology and Devices - SBMicro 2010}
}