@article{articlef199d851, title = {Fabrication and characterization of Teo2-ZnO rib waveguides}, author = {Cacho, Vanessa Duarte del and Siarkowski, Acácio Luiz and Morimoto, Nilton Itiro and Borges, Ben-Hur Viana and Kassab, Luciana Reyes Pires}, year = {2010}, doi = {10.1149/1.3474163}, journal = {Microelectronics Technology and Devices - SBMicro 2010} }