@article{articlee735d9ab,
title   = {Characterization of InN thin films grown by IBAD method},
author = {Sparvoli, Marina and Chubaci, José Fernando Diniz and Mansano, Ronaldo Domingues},
year = {2010},
doi = {10.1149/1.3474155},
journal   = {Microelectronics Technology and Devices - SBMicro 2010}
}