@article{article454b3149,
title   = {a-Si:H thin films deposited at low temperature by sputtering},
author = {Nunes, Carolina Carvalho Previdi and Zambom, Luís da Silva and Mansano, Ronaldo Domingues},
year = {2010},
doi = {10.1149/1.3474151},
journal   = {Microelectronics Technology and Devices - SBMicro 2010}
}