@article{article2c680d1d,
title   = {Thickness dependence of indium-tin oxide thin films deposited by RF magnetron sputtering},
author = {Damiani, Larissa Rodrigues and Mansano, Ronaldo Domingues},
year = {2010},
doi = {10.1149/1.3474149},
journal   = {Microelectronics Technology and Devices - SBMicro 2010}
}