@article{articleeade7897,
title   = {A multi-process microfabrication simulator based on cellular automata},
author = {Colombo, Fábio Belotti and Páez Carreño, Marcelo Nelson},
year = {2010},
doi = {10.1149/1.3474147},
journal   = {Microelectronics Technology and Devices - SBMicro 2010}
}