@article{articledad31bf8, title = {TiOxNy anti-resonant layer ARROW waveguides}, author = {Carvalho, Daniel Orquiza de and Albertin, Katia Franklin and Alayo Chávez, Marco Isaías}, year = {2010}, doi = {10.1002/pssc.200982878}, journal = {Physica Status Solidi (c)} }