@article{article0cfb4682,
title   = {Residual stresses in titanium nitride thin films obtained with step variation of substrate bias voltage during deposition},
author = {Gómez Gómez, Adriana and Recco, Abel André Cândido and Lima, N B and Martinez, L G and Tschiptschin, André Paulo and Souza, Roberto Martins de},
year = {2010},
doi = {10.1016/j.surfcoat.2010.03.016},
journal   = {Surface & Coatings Technology}
}