@inproceedings{inproceedingsa59d056f,
title   = {Thermal oxide passivation by corona charges},
author = {Ramos, Carlos Alberto Santos and Sanchez, Manuel Cid and Onmori, Roberto Koji and Stem, Nair},
year = {2008},
doi = {10.1149/1.2956071},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices}
}