@inproceedings{inproceedings86c8319d, title = {Pattern transfer by diffractive photomask}, author = {Cirino, Giuseppe Antonio and Mansano, Ronaldo Domingues and Verdonck, Patrick Bernard and Cescato, Lucila H. and Marega Junior, Euclydes and Gonçalves Neto, Luiz}, year = {2009}, doi = {10.1364/FIO.2009.JWC4}, publisher = {Optical Society of America - OSA}, booktitle = {Frontiers in Optics} }