@inproceedings{inproceedingsb3d0092c,
title   = {Impact of TiN metal gate thickness and the HsSiO nitridation on MuGFETs electrical performance},
author = {Rodrigues, M and Mercha, A. and Simoen, Eddy and Collaert, Nadine and Claeys, Cor and Martino, João Antonio},
year = {2009},
publisher = {IEEE},
booktitle   = {International Conference on Ultimate Integration on Silicon}
}