@article{article3d71d30f, title = {Research on quick polishing of CVD diamond film}, author = {Choung-Lii, Chao and Wei-Haw, Fan and Wen-Chen, Chou and Chun-Yu, Chien and Hung-Yi, Lin and Duduch, Jaime Gilberto}, year = {2008}, journal = {Key Engineering Materials} }