@inproceedings{inproceedingsc22415bd,
title   = {Etching characteristics and surface morphology of nitrogen-doped a-SiC films prepared by RF magnetron sputtering},
author = {Fraga, Mariana Amorim and Pessoa, Rodrigo S and Oliveira, Ivo C and Massi, Marcos and Maciel, Homero Santiago and Martinho, Herculano Silva and Santos Filho, Sebastião Gomes dos and Marcuzzo, Jossano Saldanha},
year = {2008},
doi = {10.1149/1.2956052},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}