@inproceedings{inproceedings2619a900,
title   = {Photoluminescence in silicon-rich PECVD silicon oxynitride alloys},
author = {Ribeiro, M and Pereyra, Inés},
year = {2008},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}