@inproceedings{inproceedings7536b168, title = {Halo optimization for 0.13 micron SOI CMOS technology}, author = {Agopian, Paula Ghedini Der and Arrabaça, Julia Maria and Martino, João Antonio}, year = {2008}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on Microelectronics Technology and Devices SBMICRO} }