@inproceedings{inproceedingsaf00a2fe,
title   = {Simulation of anisotropic etching of silicon using a cellular automata model},
author = {Oliveira Junior, Jose Pinto de and Paez Carreño, Marcelo Nelson},
year = {2008},
doi = {10.1149/1.2956015},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}