@inproceedings{inproceedingsb776f9b4, title = {Growth, structure and morphology of Mn-containing amorphous silicon films deposited by sputtering}, author = {Ferri, F. A. and Zanatta, Antonio Ricardo}, year = {2009}, publisher = {Sociedade Brasileira de Física - SBF}, booktitle = {Encontro Nacional de Física da Matéria Condensada - ENFMC} }