@inproceedings{inproceedingsb663d274, title = {Novel Si field emission devices fabrication method based on HI-PS technique for gas sensors development}, author = {Dantas, Michel Oliveira da Silva and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Kopelvski, Maycon Max and Ramírez Fernandez, Francisco Javier}, year = {2008}, booktitle = {International Meeting on Chemical Sensors} }