@article{articlea7799427, title = {Silicon field-emission devices fabricated using the hydrogen implantation-porous silicon (HI-PS) micromachining technique}, author = {Dantas, Michel Oliveira da Silva and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Kopelvski, Maycon Max and Ramírez Fernandez, Francisco Javier}, year = {2008}, doi = {10.1109/JMEMS.2008.927743}, journal = {Journal of Microelectrochemical Systems} }