@article{article0c78485e,
title   = {X-ray photoelectron spectroscopy analysis of zirconium nitride-like filmsprepared on Si(100) substrates by ion beam assisted deposition},
author = {Matsuoka, Masao and Isotani, Sadao and Mamani, Wilmer Alexe Sucasaire and Kuratani, N and Ogata, K},
year = {2008},
doi = {10.1016/j.surfcoat.2007.11.019},
journal   = {Surface and Coatings Technology}
}