@article{article6665df99, title = {Critical parameter determination of sonic flow controller diamond microtubes and micronozzles}, author = {Mammana, Suelene da Silva and Degasperi, Francisco Tadeu and Salvadori, Maria Cecília Barbosa da Silveira and Sparapani, Danilo da Costa and Laino, Murilo Ferrari and Rangel, Ricardo Cardoso and Teixeira, Fernanda de Sá and Cattani, Mauro Sérgio Dorsa}, year = {2007}, doi = {10.1116/1.2790924}, journal = {Journal of Vacuum Science & Technology B} }