@article{article504c8124,
title   = {Fabrication of Ti-Si-Ti metal-semiconductor-metal photodetectors using low temperature rapid thermal annealing},
author = {Ohta, Ricardo Luís and Viana, Carlos Eduardo and Morimoto, Nilton Itiro and Borges, Ben-Hur Viana},
year = {2007},
journal   = {Journal of Integrated Circuits and Systems}
}