@inproceedings{inproceedingsc8e3c97f,
title   = {Study of nickel silicide as mask for alkaline solutions to V-grooves fabrication},
author = {Mascaro, Amanda Rossi and Gonçalves, Lucas Gonçalves Dias and Morimoto, Nilton Itiro},
year = {2007},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}