@inproceedings{inproceedings961ed03c, title = {Silicon microtips arrays fabricated by HI-PS technique for application in field emission devices}, author = {Dantas, Michel Oliveira da Silva and Kopelvski, Maycon Max and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Ramírez Fernandez, Francisco Javier}, year = {2007}, doi = {10.1149/1.2766920}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on Microelectronics Technology and Devices SBMICRO} }