@inproceedings{inproceedingsde86c341, title = {Silicon microtips with self-aligned integrated electrodes}, author = {Barros, A.L. and Lopes, Alexandre Tavares and Paez CarreƱo, Marcelo Nelson}, year = {2007}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on Microelectronics Technology and Devices SBMICRO} }