@inproceedings{inproceedings41ff8f4d,
title   = {Study of MOS capacitors with annealed TiO2 gate dielectric layer},
author = {Albertin, Katia Franklin and Valle, Marcio A and Pereyra, Inés},
year = {2007},
doi = {10.1149/1.2766918},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}