@inproceedings{inproceedings764d97c6,
title   = {Deposition and characterization of indium-tin oxide thin films deposited by RF sputtering},
author = {Damiani, Larissa Rodrigues and Mansano, Ronaldo Domingues},
year = {2007},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}