@inproceedings{inproceedings85803cfb,
title   = {Dynamic scaling of the surface roughness during electroless Cu plating onto Si in aqueous fluoride solution},
author = {Gozzi, Giuliano and Santos Filho, Sebastião Gomes dos},
year = {2007},
doi = {10.1149/1.2766884},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}