@inproceedings{inproceedingsb1037960,
title   = {Sidewall angle influence on the finFET analog parameters},
author = {Giacomini, Renato Camargo and Martino, João Antonio and Pavanello, Marcelo Antonio},
year = {2007},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}