@article{article1dd5e449, title = {Atomic force microscope nanolithography of polymethylmethacrylate polymer}, author = {Teixeira, Fernanda de Sá and Mansano, Ronaldo Domingues and Salvadori, Maria Cecília Barbosa da Silveira and Cattani, Mauro Sérgio Dorsa and Brown, I G}, year = {2007}, doi = {10.1063/1.2736311}, journal = {Review of Scientific Instruments} }