@inproceedings{inproceedings8eeaa59c,
title   = {Study of the structural properties of the PECVD SiOxNy dielectric layers obtained with different RF powers by XANES and EXAFS analysis},
author = {Albertin, Katia Franklin and Fantini, Márcia Carvalho de Abreu and Pereyra, Inés},
year = {2006},
publisher = {SBPMat - Sociedade Brasileira de Pesquisa em Materiais},
booktitle   = {Brazilian MRS Meeting}
}