@article{articleea39011f,
title   = {Local bonding in PECVD-"SiO IND.X" "N IND.Y" films},
author = {Criado, Denise and Alayo Chávez, Marco Isaías and Fantini, Márcia Carvalho de Abreu and Pereyra, Inés},
year = {2006},
journal   = {Journal of Non-Crystalline Solids}
}