@inbook{inbook0212e418, title = {Extraction of the interface and oxide charge density in silicon-on-insulator MOSFETs}, author = {Simoen, Eddy and Claeys, Cor and Lukyanchikova, N and Petrichuk, M and Garbar, N and Martino, João Antonio and Sonnenberg, Victor}, year = {1996}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on Silicon-on-Insulator Technology and Devices} }