@article{articled21eddf4, title = {Hydropholic plasma polymerized hexamethydisilazane thin films: characterization and uses}, author = {Carvalho, Alexsander Tressino de and Carvalho, Rodrigo Amorim Motta and Silva, Maria Lucia Pereira da and Demarquette, Nicole Raymonde}, year = {2006}, doi = {10.1590/s1516-14392006000100003}, journal = {Materials Research} }