@inproceedings{inproceedings48773199,
title   = {Amorphous carbon nitride (a-CNx) thin films deposited by ECR plasma reactor},
author = {Matta, J A S da and Fantini, Márcia Carvalho de Abreu and Galvão, Ricardo Magnus Osório},
year = {2005},
publisher = {SBF},
booktitle   = {Encontro Brasileiro de Física dos Plasmas}
}