@inproceedings{inproceedings9f120401, title = {Influence of the gate oxide tunneling effect on the extraction of the silicon film and front oxide thickness in SOI nMOSFET}, author = {Paiola, A.G. and Nicolett, Aparecido Sirley and Martino, João Antonio}, year = {2005}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on Microelectronics Technology and Devices SBMICRO} }