@inproceedings{inproceedings78fd3ce9,
title   = {Integrated optical chemical sensor fabricated on silicon substrate},
author = {Siarkowski, Acácio Luiz and Morimoto, Nilton Itiro and Baptista, Maurício da Silva and Borges, Ben-Hur Viana},
year = {2005},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}