@inproceedings{inproceedings615af0b8,
title   = {Determination of the ion density and electron temperature using a planar electrostatic probe},
author = {Swart, Laura and Verdonck, Patrick Bernard},
year = {2005},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}