@inproceedings{inproceedingsb969ae56, title = {Simple method to determine the poly gate doping concentration based on poly depletion effect}, author = {Rodrigues, Michele and Sonnenberg, Victor and Martino, João Antonio}, year = {2005}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on Microelectronics Technology and Devices SBMICRO} }