@inproceedings{inproceedingscebaafca,
title   = {Polycrystallization of a-SiC:H layers by excimer laser annealing for TFT fabrication},
author = {Garcia, B. and Estrada, M. and Albertin, Katia Franklin and Páez Carreño, Marcelo Nelson},
year = {2005},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}