@article{articleba40c67e,
title   = {Roughness and nanoholes in sol-gel thin films},
author = {Antunes, A and Amaral, T and Brito, Giancarlo Espósito de Souza and Abramof, E and Morelhão, Sérgio Luiz},
year = {2005},
doi = {10.1016/j.mejo.2005.02.078},
journal   = {Microelectronics Journal}
}