@article{articlec6f69183, title = {Plasma polymerized TEOS films for nanochannels formation and sensor development}, author = {Carvalho, Rodrigo Amorim Motta and Lima, R R and Nascimento Filho, Antonio Pereira do and Silva, Maria Lucia Pereira da and Demarquette, Nicole Raymonde}, year = {2005}, doi = {10.1016/j.snb.2004.12.117}, journal = {SENSORS AND ACTUATORS B-CHEMICAL} }