@article{articlefff0cae0,
title   = {Nano-crystalline "Si IND.1-x" "C IND.x" :H thin films deposited by PECVD for SiC-on-insulator application},
author = {Escobar Forhan, Neisy Amparo and Fantini, Márcia Carvalho de Abreu and Pereyra, Inés},
year = {2004},
journal   = {Journal of Non-Crystalline Solids}
}