@article{article51944b31,
title   = {Silicon micromechanical structures fabricated by electrochemical process},
author = {Dantas, Michel Oliveira da Silva and Galeazzo, Elisabete and Peres, Henrique Estanislau Maldonado and Ramírez Fernandez, Francisco Javier},
year = {2003},
doi = {10.1109/icsens.2002.1037163},
journal   = {IEEE Sensors Journal,}
}