@inproceedings{inproceedings64da3590,
title   = {Surface integrity evaluation of diamond turned single crystal silicon component},
author = {Jasinevicius, Renato Goulart and Duduch, Jaime Gilberto and Lanciotti Junior, Francesco and Pizani, Paulo Sérgio},
year = {2004},
booktitle   = {International Conference of the European Society for Precision Engineering and Nanotechnology}
}