@inproceedings{inproceedingsf573cfd2,
title   = {The influence of the AC component of the plasma potential on the measurement of the ion flux},
author = {Swart, Jacobus Willibrordus and Verdonck, Patrick Bernard},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}