@inproceedings{inproceedings3918c3c5, title = {The influence of additives on electrical characteristics of DLC films deposited by reactive sputtering}, author = {Mansano, Ronaldo Domingues and Mousinho, Ana Paula and Zambom, Luís da Silva and Medeiros, Marina Sparvoli de and Verdonck, Patrick Bernard and Guerino, M. and Massi, Marcos}, year = {2004}, publisher = {The Electrochemical Society}, booktitle = {International Symposium on Microelectronics Technology and Devices SBMICRO} }