@inproceedings{inproceedings87877b0f,
title   = {Electrical characteristics of PECVD silicon oxide deposited with low TEOS contents at low temperatures},
author = {Rocha, Otávio Filipe da and Morimoto, Nilton Itiro and Viana, Carlos Eduardo and Gonçalves, L. C. D.},
year = {2004},
publisher = {The Electrochemical Society},
booktitle   = {International Symposium on Microelectronics Technology and Devices SBMICRO}
}